Semiconductor Process Gas Analyzers
Gasboard-3052
Trace Oxygen Gas Analyzer
- Model
- Gasboard-3052
- Category
- Gas Analyzers › Semiconductor Process Gas Analyzers
Parameters: O2
IndustriesSemiconductor
Overview
Gasboard-3052 is a zirconia-based trace oxygen analyzer for ppm-level O2 measurement in industrial processes, offering fast response, long-term stability and no routine calibration. It is used in semiconductor manufacturing, air separation and inert-gas welding, with relay alarms, 4-20 mA and voltage outputs and RS232 information query.
Key Features
- Zirconia technology for high-precision ppm-level oxygen measurement.
- Excellent long-term stability with no regular calibration required.
- Strong anti-interference capability with minimal interference from other gases.
- Compact modular design for easy installation.
- User-friendly interface with clear informative display for convenient operation.
Measured Parameters
| Parameter | Measuring Range |
|---|---|
| O2 | 0~100 ppm / 0~1000 ppm / auto |
Specifications
| Measurement Component | O2 |
|---|---|
| Range | 0-100ppm, 0-1000ppm, auto |
| Accuracy | 2%F.S |
| Resolution | 0.1ppm |
| Response Time | ≤10s |
| Warm-up Time | 5min |
| Refresh Rate | 1Hz |
| Operating Temperature | (0～50) ℃ |
| Relative Humidity | 0–95% RH (non-condensing) |
| Operating Voltage | 176-264VAC or 12VDC |
| Power Consumption | < 15W |
| Analog Current Output | 4–20 mA (max load 500 Ω) |
| Analog Voltage Output | 0-1, 0-5, 0-10VDC |
| Alarm Output | 2 alarms, 1 fault alarm |
| Communication | RS232 |
| Gas Path Connection | KF25 |
| Weight | 1.5kg |
| Dimensions | Split-type design: probe + analyzer / Analyzer (L×W×H): 178 × 105.5 × 95.2 mm / Probe (D×L): 40 × 64.5 mm |
Applications
- Semiconductor manufacturing
- Air separation
- Inert gas welding
