Semiconductor Process Gas Analyzers
Gasboard-2060
NDIR SiF₄ Gas Sensor
- Model
- Gasboard-2060
- Category
- Gas Analyzers › Semiconductor Process Gas Analyzers
Parameters: SiF4
IndustriesSemiconductor
Measurement PrincipleNDIR
Overview
Gasboard-2060 is an NDIR SiF4 sensor for real-time endpoint detection (EPD) of chamber cleaning in silicon-based CVD deposition chambers. Tracking SiF4 concentration lets operators end cleaning at the right moment, cutting cleaning time and gas use and reducing chamber wear. Its modular design with analog and digital outputs simplifies integration and maintenance.
Key Features
- NDIR technology for high sensitive and accurate SiF4 measurement.
- Fast response for precise deposition chamber cleaning endpoint determination.
- Low zero drift and high repeatibility for consistent measurement performance.
- Modular design for easy system integration.
- Analog and digital communication outputs.
Measured Parameters
| Parameter | Measuring Range |
|---|---|
| SiF4 | absorbance 0.0~0.2 |
Specifications
| Measurement 1 | SiF4 |
|---|---|
| Detection Principle | NDIR |
| Range 2 3 4 | (0.0-0.2) Absorbance |
| Response Time 5 | T90＜2s |
| Data Reporting Rate | 0.5s |
| Analog Output | 1-10VDC |
| Power Input | 15VDC (≤300mA), 24VDC |
| Digital Communication | RS232 |
| Sampling Port | KF16 |
| Dimensions | 200×120×75.5mm |
| Leak Rate | ＜1×10-8 Pa·m3/s (He) |
| Operating Temperature | (5～65) ℃ |
Applications
- Semiconductor CVD chamber cleaning endpoint detection (EPD)
