Semiconductor Process Gas Analyzers
Gasboard-2061
NDIR WF₆ Gas Sensor
- Model
- Gasboard-2061
- Category
- Gas Analyzers › Semiconductor Process Gas Analyzers
Parameters: WF6
IndustriesSemiconductor
Measurement PrincipleNDIR
Overview
Gasboard-2061 is an NDIR WF6 sensor for real-time cleaning endpoint detection in tungsten CVD chambers. By tracking WF6 concentration it signals the endpoint precisely, reducing cleaning time, gas consumption and chamber wear. It has a vacuum-tight seal, 316L corrosion-resistant construction and analog and digital interfaces.
Key Features
- NDIR technology for high sensitive and accurate WF6 measurement.
- Rapid response for real-time concentration change tracking.
- Low zero drift and high repeatability for consistent measurement performance.
- Robust sealing design for stable operation in vacuum environments.
- 316L corrosion-resistant construction for durability in harsh process conditions.
- Analog and digital communication interfaces for convenient integration and maintenance.
Measured Parameters
| Parameter | Measuring Range |
|---|---|
| WF6 | 0~200 mTorr |
Specifications
| Measurement Component | WF6 |
|---|---|
| Range | 0-200 mTorr |
| Repeatability 1 2 | ±0.5% |
| Accuracy 1 2 | ±1%F.S. |
| Operating Voltage | 24VDC |
| Operating Current | 1.5A (max) |
| Analog Interface | Analog Output: 0–5 VDC (4 ch) or 4–20 mA (4 ch) / Analog Input: 0–10 VDC (1 ch) |
| Digital Interface | Digital Output: 4 ch / Digital Input: 1 ch |
| Communication | RS485 |
| Sampling Port | NW25 |
| Leak Rate 3 | ≤1 x 10-6 Pa·m3/s (He) |
| Operating Ambient Temperature | (20～35) ℃ |
Applications
- Tungsten CVD (WCVD) chamber cleaning endpoint detection
