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Semiconductor

In semiconductor fabs, trace particles and small shifts in process gas concentration directly affect yield. This page groups instruments for cleanroom particle control, process gas analysis and specialty gas leak monitoring.

Instrument Categories

Portable Particle Counters 1
Online (Remote) Particle Counters 5
Multi-Gas Analyzers 1
Semiconductor Process Gas Analyzers 3

Portable Particle Counters

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Portable Particle Counters

OPC-6511DS

28.3 LPM Portable Optical Particle Counter

Parameters: >0.3 μm, >0.5 μm, >1.0 μm, >5.0 μm, >10 μm

Online (Remote) Particle Counters

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Online (Remote) Particle Counters

OPC-6510DS

28.3 LPM Online Particle Counter with Display

Parameters: >0.3 μm, >0.5 μm, >1.0 μm, >5.0 μm, >10 μm

Online (Remote) Particle Counters

OPC-6510

28.3 LPM Online Particle Counter without Display

Parameters: >0.3 μm, >0.5 μm, >1.0 μm, >5.0 μm, >10 μm

Online (Remote) Particle Counters

OPC-6303DS

2.83 LPM Online Particle Counter with Display

Parameters: >0.3 μm, >0.5 μm, >1.0 μm, >2.5 μm, >5.0 μm, >10 μm

Online (Remote) Particle Counters

OPC-6303M

2.83 LPM Online Particle Counter without Display

Parameters: >0.3 μm, >0.5 μm, >1.0 μm, >2.5 μm, >5.0 μm, >10 μm

Online (Remote) Particle Counters

OPC-8050

28.3 LPM Online Particle Counter OPC-8050

Parameters: 0.5 μm, 1.0 μm, 5.0 μm, 10 μm, 25 μm, 50 μm

Multi-Gas Analyzers

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Multi-Gas Analyzers

GSR-1000

Fixed Multi-Gas Monitor

Parameters: CO, CO2, CH4, H2S, NH3, O2, H2, NO, SO2, HF, PH3, VOC, HCHO, HCl, SiO2

Semiconductor Process Gas Analyzers

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Semiconductor Process Gas Analyzers

Gasboard-3052

Trace Oxygen Gas Analyzer

Parameters: O2

Semiconductor Process Gas Analyzers

Gasboard-2060

NDIR SiF₄ Gas Sensor

Parameters: SiF4

Semiconductor Process Gas Analyzers

Gasboard-2061

NDIR WF₆ Gas Sensor

Parameters: WF6

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