Substation (GIS/GIT) Gas Analyzers
KPA-200
Portable CF₄ & HF Gas Analyzer
- Model
- KPA-200
- Manufacturer
- SENSORONIC
- Category
- Gas Analyzers › Substation (GIS/GIT) Gas Analyzers
Parameters: CF4, HF
IndustriesPower Utilities
Overview
KPA-200 is a portable multi-gas monitor that measures carbon tetrafluoride (CF₄) and hydrogen fluoride (HF). It measures CF₄ up to 1,000 ppm and HF up to 10 ppm, together with gas flow and external pressure.
It features a response time (T90) within 5 seconds, a 5-inch TFT color touch screen (800×480), 16 GB SSD storage, a USB data interface and a built-in 24-column thermal printer.
It is used for concentration measurement and checks in semiconductor etching, display and electronic component manufacturing, industrial processes using fluorinated gases and gas treatment equipment.
Key Features
- CF₄ and HF gas concentration measurement
- Gas analysis with high-precision sensors
- CF₄ measurement up to 1,000 ppm
- HF measurement up to 10 ppm
- Gas flow and external pressure measurement
- 5-inch TFT color LCD display
- 800×480 touch screen
- Fast response within 5 s (T90)
- 16 GB SSD data storage
- USB data interface
- Built-in 24-column thermal printer
- Real-time printing and recording of results
- Easy gas connection with quick coupling
- Rechargeable Li-ion battery
- Rugged, portable industrial case
Measured Parameters
| Parameter | Measuring Range |
|---|---|
| CF₄ | 0~1,000ppm |
| HF | 0~10ppm |
| Flow rate | 0~2,000sccm |
Measurement Performance
| Parameter | Method · Accuracy · Resolution |
|---|---|
| CF₄ | Method: Polymer (as stated in source) · Accuracy: ±2℃ (as stated in source) · Resolution: 1ppm |
| HF | Method: ECD · Accuracy: ±5%FS · Resolution: 0.1ppm |
| Flow rate | Method: Thermal Mass · Accuracy: ±2%FS · Resolution: 1sccm |
Specifications
| Manufacturer | SENSORONIC |
|---|---|
| Measured gases | CF₄, HF |
| CF₄ measurement range | 0~1,000ppm |
| HF measurement range | 0~10ppm |
| HF measurement method | ECD |
| Flow measurement method | Thermal Mass |
| Display | 5-inch TFT color LCD |
| Screen resolution | 800×480 Pixels |
| Touch screen | Supported |
| Response time (T90) | Within 5 s |
| Storage | 16GB SSD |
| Data interface | USB |
| Gas connection | Quick Coupling with 2m Flexible Tube |
| Sample flow | 500cc/min |
| Printer | 24-Column Thermal Printer |
| Result output | Built-in thermal printer |
| Power supply | Rechargeable Li-ion battery 12 V / 7.8 Ah |
| Dimensions | 300×200×190 mm (W×H×D) |
| Weight | 3.5kg |
Applications
- CF₄ and HF concentration measurement in semiconductor manufacturing
- Gas monitoring at display manufacturing facilities
- Concentration analysis in industrial processes using fluorinated gases
- Performance checks of gas purification and treatment equipment
- CF₄ and HF gas analysis in research institutes and testing laboratories
- Process gas analysis in semiconductor etching
- Gas monitoring at electronic component manufacturing facilities
- Gas composition measurement at industrial gas treatment and exhaust facilities
- Condition checks of industrial gas piping and supply equipment
- Industrial equipment maintenance and on-site gas measurement
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