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Cleanroom Monitoring Systems

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Cleanroom Monitoring Systems

Category

All Products
Air Quality Monitors13
Particle Counters8
Gas Analyzers93
Gas Detectors & Alarms41
Continuous Monitoring Systems3
- Continuous Emission Monitoring Systems (CEMS)3
Flow, Pressure & Process Instruments26

Industry

Semiconductor 10
Cleanroom & Pharmaceutical 10
Environmental Monitoring 12
Emission Monitoring 31
Automotive 19
Industrial Process 44
Indoor Air Quality & Public Facilities 22
Energy & Biogas 34
Power Utilities 9
Building & HVAC 34
Battery Manufacturing 4

Purpose

Regulatory Compliance 24
Continuous Monitoring 65
Spot Checks 31
Safety Alarm 35
Process Control 24
R&D and Testing 7
OEM Integration 62

Measured Parameter

Particulate Matter (PM) 27
Particle Count 13
CO₂ 77
CO 54
O₂ 55
NOx (NO, NO₂) 30
SO₂ 22
CH₄ (Methane) 56
H₂ (Hydrogen) 21
H₂S (Hydrogen Sulfide) 24
NH₃ (Ammonia) 7
N₂O 8
Hydrocarbons (HC) 22
Formaldehyde (HCHO) 8
VOC / TVOC 14
O₃ (Ozone) 5
SF₆ 5
Refrigerant Gases 10
Moisture & Dew Point 8
Temperature & Humidity 12
Flow 15
Calorific Value & Wobbe Index 10
HCl / HF 4

Measurement Principle

Light Scattering 26
NDIR 49
Electrochemical 9
UV-DOAS 12
NDUV 3
TDLAS 12
Laser Raman 3
Ultrasonic 8
GFC 1
QCL 1

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